1. There’s plenty of room at the bottom;Feynman,1961
2. Nanoelectromechanical systems;Craighead;Science,2000
3. MEMS and Microsystems: Design and Manufacture;Hsu,2002
4. MEMS and NEMS: Systems, Devices, and Structures;Lyshevski,2002
5. Carbon Nanotubes: Science and Applications;Meyyappan,2004