1. School of Microelectronics, Shanghai University, Shanghai 200444, China
2. Zhangjiang Laboratory, Shanghai 200031, China
3. State Key Laboratory of Transducer Technology, Aerospace Information Research Institute (AIR), Chinese Academy of Sciences, Beijing 100190, China
4. Institute of Neuroscience, State Key Laboratory of Neuroscience, CAS Center for Excellence in Brain Science and Intelligence Technology, Chinese Academy of Sciences, Shanghai 200031, China
5. Shanghai Mtrix Technology Co., Ltd., Shanghai 200031, China
6. Lingang Laboratory, Shanghai 200031, China