Structural Design Optimization of Micro-Thermoelectric Generator for Wearable Biomedical Devices

Abstract

Wearable sensors to monitor vital health are becoming increasingly popular both in our daily lives and in medical diagnostics. The human body being a huge source of thermal energy makes it interesting to harvest this energy to power such wearables. Thermoelectric devices are capable of converting the abundantly available body heat into useful electrical energy using the Seebeck effect. However, high thermal resistance between the skin and the device leads to low-temperature gradients (2–10 K), making it difficult to generate useful power by this device. This study focuses on the design optimization of the micro-thermoelectric generator for such low-temperature applications and investigates the role of structural geometries in enhancing the overall power output. Electroplated p-type bismuth antimony telluride (BiSbTe) and n-type copper telluride (CuTe) materials’ properties are used in this study. All the simulations and design optimizations were completed following microfabrication constraints along with realistic temperature gradient scenarios. A series of structural optimizations were performed including the thermoelectric pillar geometries, interconnect contact material layers and fill factor of the overall device. The optimized structural design of the micro-thermoelectric device footprint of 4.5 × 3.5 mm2, with 240 thermoelectric leg pairs, showcased a maximum power output of 0.796 mW and 3.18 mW when subjected to the low-temperature gradient of 5 K and 10 K, respectively. These output power values have high potential to pave the way of realizing future wearable devices.