1. Department of Light-Induced Surface Phenomena, Prokhorov General Physics Institute of the Russian Academy of Sciences, Vavilov Str. 38, 119991 Moscow, Russia
2. Department of High-Efficiency Machining Technologies, Moscow State University of Technology STANKIN, Vadkovskiy Per. 3A, 127055 Moscow, Russia
3. Laboratory of Physics of Defects and Phase Transformations in Solid Structures, Division of Solid-State Physics, P. N. Lebedev Physical Institute of the Russian Academy of Sciences, Leninsky Avenue, 53, 119991 Moscow, Russia
4. Semiconductor Growth Laboratory MOCVD, Fryazinsky Branch of the V. A. Kotelnikov Institute of Radio Engineering and Electronics of the Russian Academy of Sciences, 1 Vvedensky Square, 141190 Fryazino, Russia