1. Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2. College of Da Heng, University of the Chinese Academy of Sciences, Beijing 100039, China
3. State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
4. Jilight Semiconductor Technology Co., Ltd., Changchun 130033, China