1. State Key Laboratory of Engine and Powertrain System, Weifang 261061, China
2. Engine Research Institute, Weichai Power Co., Ltd., Weifang 261061, China
3. Chongqing Key Laboratory of Micro-Nano Systems and Intelligent Transduction, Chongqing Technology and Business University, Chongqing 400067, China
4. Department of Microsystems, Faculty of Natural Sciences, Technologies, and Marine Studies, University of South-Eastern Norway, 3184 Horten, Norway