An Aerosol Sensor for Multi-Sized Particles Detection Based on Surface Acoustic Wave Resonator and Cascade Impactor

Abstract

This research proposed the design, fabrication, and experiments of a surface acoustic wave resonator (SAWR)-based multi-sized particles monitor. A wide range selection and monitoring of large coarse particles (LCP), inhalable particles (PM10), and fine inhalable particles (PM2.5) were achieved by combining high-performance 311 MHz SAWRs and a specially designed cascade impactor. This paper calculated the normalized sensitivity distribution of the chip to the mass loading effect, extracted the optimal response area for particle attachment, analyzed the influence of the distance between nozzle and chip surface on the particle distribution, and evaluated the collection efficiency of the specially designed 2 LPM (L/min) impactor through computational fluid dynamics simulation software. An experimental platform was built to conduct the response experiment of the sensor to particle-containing gas generated by the combustion of leaf fragments and repeatability test. We verified the results of the particle diameter captured at each stage. This research suggests that the sensor’s response had good linearity and repeatability, while the particles collected on the surface of the SAWR in each impactor stage met the desired diameter, observed through a microscope.