Affiliation:
1. School of Microelectronics, Shanghai University, Shanghai 201800, China
2. Shanghai Aure Technology Limited Company, Shanghai 201800, China
Abstract
The rational integration of many microfluidic chips and micropumps remains challenging. Due to the integration of the control system and sensors in active micropumps, they have unique advantages over passive micropumps when integrated into microfluidic chips. An active phase-change micropump based on complementary metal–oxide–semiconductor–microelectromechanical system (CMOS-MEMS) technology was fabricated and studied theoretically and experimentally. The micropump structure is simple and consists of a microchannel, a series of heater elements along the microchannel, an on-chip control system, and sensors. A simplified model was established to analyze the pumping effect of the traveling phase transition in the microchannel. The relationship between pumping conditions and flow rate was examined. Based on the experimental results, the maximum flow rate of the active phase-change micropump at room temperature is 22 µL/min, and long-term stable operation can be achieved by optimizing heating conditions.
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Reference23 articles.
1. MEMS-Micropumps: A Review;Nguyen;ASME J. Fluids Eng.,2002
2. Microfluidics: Fluid Physics at the Nanoliter Scale;Squires;Rev. Mod. Phys.,2005
3. Takagi, H., Maeda, R., Ozaki, K., Parameswaran, M., and Mehta, M. (1994). Proceedings of the 1994 5th International Symposium on Micro Machine and Human Science Proceedings, IEEE.
4. Eccentric Actuator Driven by Stacked Electrohydrodynamic Pumps;Mao;J. Zhejiang Univ. Sci. A,2022
5. Electroosmotic Pumping and Electrophoretic Separations for Miniaturized Chemical Analysis Systems;Manz;J. Micromech. Microeng.,1994