Fabrication of Multiscale 1-Octadecene Monolayer Patterned Arrays Based on a Chemomechanical Method

Abstract

A controlled and self-assembled micromachining system was built to fabricate a mico/nanoscale monolayer patterned array on a silicon surface using a diamond tip. The process was as follows: (1) we preprocessed a silicon wafer to obtain a hydrogen-terminated silicon surface; (2) we scratched three rectangular arrays of 10 μm × 3 μm with a spacing of 2 μm on the silicon surface with a diamond tip in 1-octadecene solution; the Si-H bonds were broken, and silicon free radicals were formed; (3) the 1-octadecene molecules were connected with silicon atoms based on Si-C covalent bonds, and the 1-octadecene nano monolayer was self-assembled on the patterned arrays of the silicon surface. Atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS), and Sessile water contact angles were used to detect and characterize the self-assembled monolayers (SAMs). The XPS results showed that the Si2p peak and the O1s peak were significantly decreased after self-assembly; however, the C1s peak was successively significantly increased. Sessile water contact angles showed that the hydrophilicity was weakened after the formation of 1-octenecene SAMs on the silicon substrate. The nanofriction of the sample was measured with AFM. The change in nanofriction also demonstrated that the SAMs were formed in accordance with the patterned array. We demonstrated that, by using this method, self-assembled multiscale structures on silicon substrate can be formed quickly and conveniently.