A Novel Miniature and Selective CMOS Gas Sensor for Gas Mixture Analysis—Part 3: Extending the Chemical Modeling
-
Published:2023-01-20
Issue:2
Volume:14
Page:270
-
ISSN:2072-666X
-
Container-title:Micromachines
-
language:en
-
Short-container-title:Micromachines
Author:
Goikhman Boris1, Avraham Moshe1, Bar-Lev Sharon1, Stolyarova Sara1, Blank Tanya1, Nemirovsky Yael1
Affiliation:
1. Electrical and Computer Engineering Department, Technion—Israel Institute of Technology, Haifa 32000, Israel
Abstract
This is the third part of the paper presenting a miniature, combustion-type gas sensor (dubbed GMOS) based on a novel thermal sensor (dubbed TMOS). The TMOS is a micromachined CMOS-SOI transistor, which acts as the sensing element and is integrated with a catalytic reaction plate, where ignition of the gas takes place. The first part was focused on the chemical and technological aspects of the sensor. In Part 2, the emphasis was on the physical aspects of the reaction micro-hot plate on which the catalytic layer is deposited. The present study focuses on applying several advanced simulation tools, which extend our understanding of the GMOS performance, as well as pellistor sensors in general. The three main challenges in simulating the performance are: (i) how to define the operating temperature based on the input parameters; (ii) how to measure the dynamics of the temperature increase during cyclic operation at a given duty cycle; (iii) how to model the correlation between the operating temperature and the sensing response. The simulated and analytical models and measured results are shown to be in good agreement.
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
Reference19 articles.
1. Love, C., Nazemi, H., El-Masri, E., Ambrose, K., Freund, M., and Emadi, A. (2021). A Review on Advanced Sensing Materials for Agricultural Gas Sensors. Sensors, 21. 2. Martinsen, M., Dahlquist, E., Lönnermark, A., and Säker, Ö. (2019, January 12–16). Gas sensors for early detection of fire hazards caused by vehicles in underground mines. Proceedings of the 60th SIMS Conference on Simulation and Modelling SIMS 2019, Västerås, Sweden. 3. Trace detection of explosives with a unique large volume injection gas chromatography-mass spectrometry (LVI-GC-MS) method;Marder;Anal. Methods,2018 4. Placidi, P., Gasperini, L., Grassi, A., Cecconi, M., and Scorzoni, A. (2020). Characterization of Low-Cost Capacitive Soil Moisture Sensors for IoT Networks. Sensors, 20. 5. Shlenkevitch, D., Stolyarova, S., Blank, T., Brouk, I., and Nemirovsky, Y. (2020). Novel Miniature and Selective Combustion-Type CMOS Gas Sensor for Gas-Mixture Analysis—Part 1: Emphasis on Chemical Aspects. Micromachines, 11.
|
|