Research on Static and Dynamic Characteristics of Gas-lubricated Microbearings for Microfluidic Devices

Abstract

Aerodynamic journal microbearings with microtribological phenomena significantly influence the operating stability of microfluidic devices. The modified Reynolds equations including different rarefaction models are derived and are solved by the partial derivative method and relaxation iteration algorithm. The effects of Knudsen number and bearing parameters on the static and dynamic characteristics of microbearings are investigated in detail. The results show that the rarefaction effect plays a crucial role in the ultra-thin gas film lubrication. The maximum film pressure of Fukui–Kaneko (FK) model is lowest and the result in Boltzmann model is largest in small Knudsen number regions. As the Knudsen number increases further, the curve of FK model is coincident with that of the Boltzmann model in the transition regime. The direct stiffness coefficients of Boltzmann model increase with the increase of eccentricity ratio and aspect ratio, whereas the effect of Knudsen number on the damping coefficients yields a relatively complicated trend.