Author:
Goustouridis Dimitrios,Raptis Ioannis,Mpatzaka Theodora,Fournari Savvina,Zisis Grigorios,Petrou Panagiota,Beltsios Konstantinos G.
Abstract
In this work, we consider White Light Reflectance Spectroscopy (WLRS) as an optical methodology for the accurate, fast and non-destructive measurement of film thickness in the 1 nm to the 1 mm range and for applications that include microelectronics, photonics, bioanalysis and packaging. Films to which WLRS is applicable can be either homogeneous or layered-composite ones, while thickness and composition might be fixed or varying with time; in the latter case, real-time monitoring of the kinetics of processes such as certain transitions, film dissolution and bioreactions is possible. We present the basic principles of WLRS and a selection of characteristic application examples of current interest, and we also briefly compare WLRS with alternative methods for film measurement.
Funder
Operational Program Competitiveness, Entrepreneurship and Innovation, under the call RE-SEARCH – CREATE – INNOVATE
Reference31 articles.
1. Optical Characterization of Thin Solid Films,2018
2. Spectroscopic Ellipsometry: Practical Application to Thin Film Characterization;Tompkins,2015
3. A Practical Guide to Optical Metrology for Thin Films;Quinten,2012
4. Combining TEM, AFM, and Profilometry for Quantitative Topography Characterization Across All Scales
5. Thickness Measurement of Metallic Film Based on a High-Frequency Feature of Triple-Coil Electromagnetic Eddy Current Sensor
Cited by
6 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献