Analysis of Wafer Warpage in Diamond Wire Saw Slicing Sapphire Crystal

Abstract

During the diamond wire saw cutting process of sapphire crystals, warpage is one of the key parameters for evaluating wafer quality. Based on the thermoelasticity theory and diamond wire saw cutting theory, a finite element model for thermal analysis of diamond wire saw cutting sapphire crystals was established in this paper. The variation laws and internal connections of the temperature field and thermal deformation displacement field of the wafer during the sawing process were analyzed. A calculation and analysis model for the warpage of sapphire crystal wafer cut by wire saw was established based on the node thermal deformation displacement field of the wafer, and the rationality of the simulation results was verified through sawing experiments. This simulation calculation model constructs the mapping relationship between the process parameters of diamond wire sawing and the sapphire wafer warpage during sawing. The influence of wafer thickness, diamond wire speed, feed rate, diamond wire diameter, and tension on the warpage of the wafer was studied using the simulation model. The results indicate that the highest temperature occurs in the sawing area during cutting. The wafer thickness decreases and the warpage increases. The wafer warpage decreases with the increase of the diamond wire tension and diameter, and increases with the increase of diamond wire speed and feed rate. The research results provide a reference for understanding the variation of wafer warpage during sawing and optimizing sawing process parameters.