Femtosecond Laser Fabrication of High-Linearity Liquid Metal-Based Flexible Strain Sensor

Abstract

Liquid metal (LM) is widely used in flexible electronic devices due to its excellent metallic conductivity and ductility. However, the fabrication of LM flexible strain sensors with high sensitivity and linearity is still a huge challenge, since the resistance of LM does not change much with strain. Here, a highly sensitive and linear fully flexible strain sensor with a resistive sensing function is proposed. The sensor comprises an Fe-doped liquid metal (Fe-LM) electrode for enhanced performance. The design and manufacturing of flexible strain sensors are based on the technology of controlling surface wettability by femtosecond laser micro/nano-processing. A supermetalphobic microstructure is constructed on a polydimethylsiloxane (PDMS) substrate to achieve the selection adhesion of Fe-LM on the PDMS substrate. The Fe-LM-based flexible strain sensor has high sensitivity and linearity, a gauge factor (GF) up to 1.18 in the strain range of 0–100%, excellent linearity with an R2 of 0.9978, a fast response time of 358 ms, and an excellent durability of more than 2400 load cycles. Additionally, the successful monitoring of human body signals demonstrates the potential of our developed flexible strain sensor in wearable monitoring applications.