Properties-Adjustable Alumina-Zirconia Nanolaminate Dielectric Fabricated by Spin-Coating
Author:
Publisher
MDPI AG
Subject
General Materials Science,General Chemical Engineering
Link
http://www.mdpi.com/2079-4991/7/12/419/pdf
Reference26 articles.
1. Top-gate zinc tin oxide thin-film transistors with high bias and environmental stress stability
2. Zirconium oxide-aluminum oxide nanolaminate gate dielectrics for amorphous oxide semiconductor thin-film transistors
3. Influence of the bilayer thickness on the optical properties of Al 2 O 3 -Y 2 O 3 dielectric nanolaminate films grown by thermal atomic layer deposition
4. Atomic layer deposited TiO /AlO nanolaminates as moisture barriers for organic devices
5. A comparison between HfO2/Al2O3 nano-laminates and ternary HfxAlyO compound as the dielectric material in InGaAs based metal-oxide-semiconductor (MOS) capacitors
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3. Research Progress of High Dielectric Constant Zirconia-Based Materials for Gate Dielectric Application;Coatings;2020-07-20
4. Effect of Zirconium Doping on Electrical Properties of Aluminum Oxide Dielectric Layer by Spin Coating Method with Low Temperature Preparation;Coatings;2020-06-29
5. High-performance spin-coated aluminum oxide dielectric fabricated by a simple oxygen plasma-treatment process;Journal of Physics D: Applied Physics;2018-08-06
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