1. Faculty of Physics, Lomonosov Moscow State University, 1/2 Leninskie Gory, 119991 Moscow, Russia
2. Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences, 16A Nagatinskaya St., 119991 Moscow, Russia
3. Moscow Institute of Physics and Technology, 9 Institutskiy Per., 141701 Dolgoprudny, Russia
4. Lebedev Physical Institute, The Russian Academy of Science, 53 Leninsky Avenue, 119991 Moscow, Russia
5. Institute of Advanced Materials and Technologies, National Research University of Electronic Technology, 1 Shokina Sq., 124498 Zelenograd, Russia
6. Kurnakov Institute of General and Inorganic Chemistry of the Russian Academy of Sciences, 31 Leninsky Avenue, 119991 Moscow, Russia
7. National Research Centre “Kurchatov Institute”, 1 Akademika Kurchatova Sq., 123182 Moscow, Russia