1. Institute for Particle Technology, Technische Universität Braunschweig, Volkmaroder Str. 5, 38104 Braunschweig, Germany
2. Laboratory for Multifunctional Materials, Department of Materials, ETH Zurich, Vladimir-Prelog-Weg 5, 8093 Zurich, Switzerland
3. Fraunhofer Institute for Surface Engineering and Thin Films (IST), Bienroder Weg 54E, 38108 Braunschweig, Germany
4. Laboratory for Emerging Nanometrology, Technische Universität Braunschweig, Langer Kamp 6A, 38106 Braunschweig, Germany