Nanoscale Three-Dimensional Imaging of Integrated Circuits Using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer
Author:
Nakamura Nathan12ORCID, Szypryt Paul12ORCID, Dagel Amber L.3ORCID, Alpert Bradley K.1, Bennett Douglas A.1, Doriese William Bertrand1ORCID, Durkin Malcolm12, Fowler Joseph W.12ORCID, Fox Dylan T.3, Gard Johnathon D.12, Goodner Ryan N.3, Harris James Zachariah3, Hilton Gene C.1, Jimenez Edward S.3, Kernen Burke L.3, Larson Kurt W.3, Levine Zachary H.4ORCID, McArthur Daniel3, Morgan Kelsey M.12, O’Neil Galen C.1ORCID, Ortiz Nathan J.12, Pappas Christine G.12, Reintsema Carl D.1, Schmidt Daniel R.1, Schultz Peter A.3ORCID, Thompson Kyle R.3, Ullom Joel N.12, Vale Leila1, Vaughan Courtenay T.3, Walker Christopher3, Weber Joel C.12, Wheeler Jason W.3, Swetz Daniel S.1ORCID
Affiliation:
1. National Institute of Standards and Technology, Boulder, CO 80305, USA 2. Department of Physics, University of Colorado, Boulder, CO 80309, USA 3. Sandia National Laboratories, Albuquerque, NM 87123, USA 4. National Institute of Standards and Technology, Gaithersburg, MD 20899, USA
Abstract
X-ray nanotomography is a powerful tool for the characterization of nanoscale materials and structures, but it is difficult to implement due to the competing requirements of X-ray flux and spot size. Due to this constraint, state-of-the-art nanotomography is predominantly performed at large synchrotron facilities. We present a laboratory-scale nanotomography instrument that achieves nanoscale spatial resolution while addressing the limitations of conventional tomography tools. The instrument combines the electron beam of a scanning electron microscope (SEM) with the precise, broadband X-ray detection of a superconducting transition-edge sensor (TES) microcalorimeter. The electron beam generates a highly focused X-ray spot on a metal target held micrometers away from the sample of interest, while the TES spectrometer isolates target photons with a high signal-to-noise ratio. This combination of a focused X-ray spot, energy-resolved X-ray detection, and unique system geometry enables nanoscale, element-specific X-ray imaging in a compact footprint. The proof of concept for this approach to X-ray nanotomography is demonstrated by imaging 160 nm features in three dimensions in six layers of a Cu-SiO2 integrated circuit, and a path toward finer resolution and enhanced imaging capabilities is discussed.
Funder
Office of the Director of National Intelligence (ODNI), Intelligence Advanced Research Projects Activity National Research Council Postdoctoral Fellowships U.S. Department of Commerce, National Institute of Standards and Technology
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