Fabrication of Glass Diaphragm Based Fiber-Optic Microphone for Sensitive Detection of Airborne and Waterborne Sounds

Abstract

A glass-diaphragm microphone was developed based on fiber-optic Fabry-Perot (FP) interferometry. The glass diaphragm was shaped into a wheel-like structure on a 150-μm-thick glass sheet by laser cutting, which consists of a glass disc connected to an outer glass ring by four identical glass beams. Such a structural diaphragm offers the microphone an open air chamber that reduces air damping and increases sensitivity and results in a cardioid direction pattern for the microphone response. The prepared microphone operates at 1550 nm wavelength, showing high stability in a range of temperature from 10 to 40 °C. The microphone has a resonance peak at 1152 Hz with a quality factor of 21, and its 3-dB cut-off frequency is 32 Hz. At normal incidence of 500 Hz sound, the pressure sensitivity of the microphone is 755 mV/Pa and the corresponding minimum detectable pressure is 251 μPa/Hz1/2. In addition to the above characteristics of the microphone in air, a preliminary investigation reveals that the microphone can also work stably under water for a long time due to the combination of the open-chamber and fiber-optic structures, and it has a large signal-to-noise ratio in response to waterborne sounds. The microphone prepared in this work is simple, inexpensive, and electromagnetically robust, showing great potential for low-frequency acoustic detection in air and under water.