A Throughput Management System for Semiconductor Wafer Fabrication Facilities: Design, Systems and Implementation-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

A Throughput Management System for Semiconductor Wafer Fabrication Facilities: Design, Systems and Implementation

Published:2018-02-11 Issue:2 Volume:6 Page:16
ISSN:2227-9717
Container-title:Processes
language:en
Short-container-title:Processes

Author:

Hsieh Liam,Hsieh Tsung-Ju

Publisher

MDPI AG

Subject

Process Chemistry and Technology,Chemical Engineering (miscellaneous),Bioengineering

Link

http://www.mdpi.com/2227-9717/6/2/16/pdf

Reference45 articles.

1. Work Systems and the Methods, Measurement, and Management of Work;Groover,2007

2. Operations Management;Krajewski,1999

3. Cluster tools: A process solution;Newboe;Semicond. Int.,1990

4. Coping with the high cost of wafer fabs;Burggraaf;Semicond. Int.,1995

5. The driving forces in cluster tool development;Singer;Semicond. Int.,1995

Cited by 11 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Solving the stochastic machine assignment problem with a probability-based objective: problem formulation, solution method and practical applications;European J. of Industrial Engineering;2024

2. Digital Twin-Based Optimization of Operational Parameters for Cluster Tools in Semiconductor Manufacturing;IEEE Access;2024

3. Optimal Ventilation Design for Flammable Gas Leaking from Gas Box Used in Semiconductor Manufacturing: Case Study on Korean Semiconductor Industry;Fire;2023-11-09

4. A New Framework of the EAP System in Semiconductor Manufacturing Internet of Things;Electronics;2023-09-16

5. Commonality Analysis for Detecting Failures Caused by Inspection Tools in Semiconductor Manufacturing Processes;IEEE Transactions on Semiconductor Manufacturing;2022-11

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3