1. Institute of Mechanical Engineering and Automation, Fuzhou University, Fuzhou 350108, China
2. Fujian Provincial Key Laboratory of Force Measurement, Fujian Metrology Institute, Fuzhou 350010, China
3. Institute of Electrical Engineering, Jiangxi Metallurgical Vocational and Technical College, Xinyu 338015, China
4. Fujian Provincial Key Laboratory of Terahertz Functional Devices and Intelligent Sensing, Fuzhou 350108, China