Measurement of High Numerical Aperture Cylindrical Surface with Iterative Stitching Algorithm

Abstract

There are some limitations in null test measurements in stitching interferometry. In order to meet the null test conditions, the moving distance between the sub-apertures often deviates from the theoretical preset distance, which leads to a position deviation of sub-apertures when measured. To overcome this problem, an algorithm for data processing is proposed in this paper. An optimal estimation of the deviation between sub-apertures is used to update their positions, and then a new overlapped region is obtained and again optimized. This process is repeated until the algorithm converges to an acceptable tolerance, and finally exact stitching is realized. A cylindrical lens was taken as an object for experimental examination of the proposed method. The obtained results demonstrate the validity, reliability, and feasibility of our iterative stitching algorithm.