1. Department of Physics, Sharif University of Technology, Tehran 14588-89694, Iran
2. Research Group PLASMANT, Department of Chemistry, University of Antwerp, 2610 Antwerp, Belgium
3. School of Engineering, New Uzbekistan University, Tashkent 100007, Uzbekistan
4. School of Engineering, Central Asian University, Tashkent 111221, Uzbekistan
5. Laboratory of Thermal Physics of Multiphase Systems, Arifov Institute of Ion-Plasma and Laser Technologies, Academy of Sciences of Uzbekistan, Tashkent 100125, Uzbekistan
6. School of Electrical Engineering, Shandong University, Jinan 250061, China
7. Research Unit Plasma Technology, Department of Applied Physics, Faculty of Engineering and Agriculture, Ghent University, 9000 Ghent, Belgium