Optimized SU-8 Processing for Low-Cost Microstructures Fabrication without Cleanroom Facilities

Author:

Pinto Vânia,Sousa Paulo,Cardoso Vanessa,Minas Graça

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering

Reference25 articles.

1. Micromechanical testing of SU-8 cantilevers;Hopcroft;J. Fatigue Fract. Eng. Mater. Struct.,2005

2. PDMS as a sacrificial substrate for SU-8-based biomedical and microfluidic applications;Patel;J. Micromech. Microeng.,2008

3. SU-8 Photolithography and Its Impact on Microfluidics;Martinez-Duarte,2011

4. Microstructuring of SU-8 resist for MEMS and bio-applications;Dey;Int. J. Smart Sens. Intell. Syst.,2010

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