Modeling of MEMS Mirrors Actuated by Phase-Change Mechanism-Reference-Cited by-同舟云学术

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Modeling of MEMS Mirrors Actuated by Phase-Change Mechanism

Published:2017-04-26 Issue:5 Volume:8 Page:138
ISSN:2072-666X
Container-title:Micromachines
language:en
Short-container-title:Micromachines

Author:

Torres David,Zhang Jun,Dooley Sarah,Tan Xiaobo,Sepúlveda Nelson

Funder

National Science Foundation

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering

Link

http://www.mdpi.com/2072-666X/8/5/138/pdf

Reference43 articles.

1. A CMOS-MEMS mirror with curled-hinge comb drives;Xie;J. Microelectromech. Syst.,2003

2. A 2-D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator

3. An electrostatically driven 2D micro-scanning mirror with capacitive sensing for projection display

4. Non-resonant 2-D piezoelectric MEMS optical scanner actuated by Nb doped PZT thin film

5. Two-Axis Electromagnetic Microscanner for High Resolution Displays

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