Nickel-Oxide Based Thick-Film Gas Sensors for Volatile Organic Compound Detection

Abstract

In this paper, we report on the development of a highly sensitive and humidity-tolerant metal-oxide-based volatile organic compound (VOC) sensor, capable of rapidly detecting low concentrations of VOCs. For this, we successfully fabricated two different thicknesses of nickel oxide (NiO) sensors using a spin-coating technique and tested them with seven different common VOCs at 40% r.h. The measured film thickness of the spin-coated NiO was ~5 μm (S-5) and ~10 μm (S-10). The fastest response and recovery times for all VOCs were less than 80 s and 120 s, respectively. The highest response (Rg/Ra = 1.5 for 5 ppm ethanol) was observed at 350 °C for both sensors. Sensors were also tested in two different humidity conditions (40% and 90% r.h.). The humidity did not significantly influence the observed sensitivity of the films. Furthermore, S-10 NiO showed only a 3% drift in the baseline resistance between the two humidity conditions, making our sensor humidity-tolerant compared to traditional n-type sensors. Thus, we propose thick-film NiO (10 μm) sensing material as an interesting alternative VOC sensor that is fast and humidity-tolerant.