A Method of Ultra-Low Power Consumption Implementation for MEMS Gas Sensors

Abstract

In recent years, there has been a growing need for the development of low-power gas sensors. This paper proposes pulse heating and a corresponding measurement strategy using a Pulse Width Modulation (PWM) signal to realize the ultra-low power consumption for metal oxide semiconductor (MOS) gas sensors. A Micro-Hot-Plate (MHP) substrate was chosen to investigate the temperature and power characteristics of the MHP under different applied heating methods. The temperature of this given substrate could respond to the applied voltage within 0.1 s, proving the prac ticability of a pulse heating strategy. In addition, Pd-doped SnO2 was synthesized as the sensing material in the implementation of an ultra-low power gas sensor. The sensing performance and power consumption under different conditions were compared in the detection of reducing gases such as ethanol (C2H5OH) and formaldehyde (HCHO). Additionally, the results revealed that the sensor could work under PWM excitation while reducing the operating power to less than 1mW. The features shown in the measurements provide the feasibility for MOS gas sensors’ application in wearable and portable devices.