1. Department of Materials Engineering, Ben Gurion University of the Negev, Beer-Sheva 84105, Israel
2. Ilse Katz Institute for Nanoscale Science & Technology, Beer-Sheva 84105, Israel
3. Materials Department, Nuclear Research Center of the Negev (NRCN), Beer-Sheva P.O. Box 9001, Israel
4. Head Implanter, Helmholtz-Zentrum Dresden-Rossendorf, 01328 Dresden, Germany