Abstract
We report on microfabrication and optical characterization of buried channel waveguides defined in Nd:YCOB crystal by focused proton beam writing (PBW). In the fabrication process, the focused proton beam irradiation creates a local material modification region with geometrically symmetric positive index changes at the end of the proton trajectory, where efficient optical waveguiding can be locally supported within a fiber-like channel structure. The impact of the proton fluence (with different values ranging from 1015 to 1016 cm−2) on the optical waveguiding performance is well studied. The experimental results of the optical waveguide properties are in fairly good agreement with the simulation results.
Funder
Doctoral Research Fund of Shandong Jianzhu University
Natural Science Foundation of Shandong Province
Subject
Inorganic Chemistry,Condensed Matter Physics,General Materials Science,General Chemical Engineering