The Anti-Reflection Coating Design for the Very-Long-Wave Infrared Si-Based Blocked Impurity Band Detectors

Abstract

An anti-reflection coating on a back-illuminated 128 × 128 array Si-based blocked impurity band (BIB) detector in a very-long-wave infrared range was designed in this work. The reflectance and transmittance spectra of ZnS films with different thicknesses on intrinsic Si substrates were studied with a FDTD simulation and experiment. Compared to bare Si substrate, the reflectance of Si coated with 1.5, 2.0, 2.5, and 3.0 μm thick ZnS significantly decreased, while the transmittance increased in the range of 10.0~25.0 μm band. The transmittance enhancement ratio reached approximately 32%, 32%, 28%, and 29%, respectively. It was evidenced that the enhanced transmission at a specific wavelength was caused by the effective interference cancellation effect. Then, a 2.0 μm thick ZnS thin film was deposited on the backside of the 128 × 128 array Si-based BIB detector. The spectral responsivity of the detector increased significantly. Additionally, the blackbody responsivity increased by approximately 36%, suggesting that the ZnS film is an ideal anti-reflection material for VLWIR detectors in the range of 10.0~25.0 μm band.