Analysis of Frequency Stability and Thermoelastic Effects for Slotted Tuning Fork MEMS Resonators
Author:
Publisher
MDPI AG
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Link
http://www.mdpi.com/1424-8220/18/7/2157/pdf
Reference41 articles.
1. SiT1532 Ultra-Small 32 kHz Oscillatorwww.sitime.com
2. Design Rules for Temperature Compensated Degenerately n-Type-Doped Silicon MEMS Resonators
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