Abstract
We demonstrate a kind of grating coupler that generates a high quality flat-top beam with a small beamwidth from photonic integrated circuits into free-space. The grating coupler is designed on a silicon-on-insulator wafer with a 220-nm-thick silicon layer and consists of a dual-etch grating (DG) and a distributed Bragg reflector (DBR). By adjusting the structural parameters of DG and DBR, a pixel-level (6.6 µm) flat-top beam with a vertical radiation of −0.5 dB and a mode match of 97% at 1550 nm is realized. Furthermore, a series of high-efficiency grating couplers are designed to create a flat-top beam with different scales.
Funder
State Key Research Development Program of China
National Natural Science Foundation of China
Guangdong Basic and Applied Basic Research Foundation
Guangzhou Science, Technology and Innovation Commission
Fundamental Research Funds for the Central Universities
Subject
Radiology, Nuclear Medicine and imaging,Instrumentation,Atomic and Molecular Physics, and Optics
Cited by
5 articles.
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