1. State Key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of the Chinese Academy of Sciences, No. 3 West Road, Beitucheng, Beijing 100029, China
2. Laboratory of Microelectronic Devices and Integrated Technology, Institute of Microelectronics of the Chinese Academy of Sciences, No. 3 West Road, Beitucheng, Beijing 100029, China
3. University of Chinese Academy of Sciences, 19 Yuquan Road, Shijingshan District, Beijing 100049, China