1. Institute of Biomedical Systems, National Research University of Electronic Technology, 124498 Zelenograd, Russia
2. Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences, 119991 Moscow, Russia
3. Institute for Bionic Technologies and Engineering, I. M. Sechenov First Moscow State Medical University, 119991 Moscow, Russia
4. Institute of Physiologically Active Compounds at Federal Research Center of Problems of Chemical Physics and Medicinal Chemistry, Russian Academy of Sciences, 142432 Chernogolovka, Russia
5. Scientific-Manufacturing Complex “Technological Centre”, 124498 Moscow, Russia
6. The Kotel’nikov Institute of Radio Engineering and Electronics of the Russian Academy of Sciences, 125009 Moscow, Russia