1. State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2. College of Electronic and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3. College of Materials Science and Opto-Electronics Technology, University of Chinese Academy of Sciences, Beijing 100049, China
4. Chinese Academy of Sciences Reliability Assurance Center, Beijing 100094, China
5. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China