Development and Calibration of a Vertical High-Speed Mueller Matrix Ellipsometer

Abstract

In order to meet the requirements of dynamic monitoring from a bird’s eye view for typical rapidly changing processes such as mechanical rotation and photoresist exposure reaction, we propose a vertical high-speed Mueller matrix ellipsometer that consists of a polarization state generator (PSG) based on the time-domain polarization modulation and a polarization state analyzer (PSA) based on division-of-amplitude polarization demodulation. The PSG is realized using two cascaded photoelastic modulators, while the PSA is realized using a six-channel Stokes polarimeter. On this basis, the polarization effect introduced by switching the optical-path layout of the instrument from the horizontal transmission to the vertical transmission is fully considered, which is caused by changing the incidence plane. An in situ calibration method based on the correct definition of the polarization modulation and demodulation reference plane has been proposed, enabling the precise calibration of the instrument by combining it with a time-domain light intensity fitting algorithm. The measurement experiments of SiO2 films and an air medium prove the accuracy and feasibility of the proposed calibration method. After the precise calibration, the instrument can exhibit excellent measurement performance in the range of incident angles from 45° to 90°, in which the measurement time resolution is maintained at the order of 10 μs, the measurement accuracy of Mueller matrix elements is better than 0.007, and the measurement precision is better than 0.005.