1. Department of Nanotechnology and Microsystem Techniques, Faculty of Physics, Perm State University, 15 Bukireva Str., 614068 Perm, Russia
2. Department of General Physics, Perm National Research Polytechnic University, 29, Komsomolsky Prospekt, 614990 Perm, Russia
3. Laser Measurement and Navigation Systems Department, Electrotechnical University “LETI”, 197022 St. Petersburg, Russia