1. School of Mechanical Engineering, Tianjin Sino-German University of Applied Sciences, 2 Yanshan Rd, Haihe Education Park, Tianjin 300350, China
2. School of Precision Instruments and Opto-Electronics Engineering, and with Key Lab of Optoelectronic Information Technology (Ministry of Education), and Key Lab of Micro-Opto-Electro-Mechanical Systems (MOEMS) Technology (Ministry of Education), Tianjin University, Tianjin 300072, China
3. Fujian Institute of Research on the Structure of Matter, Chinese Academy of Sciences, Fuzhou 350002, China