Abstract
The standard silicon photonic platforms provide three-step silicon etching, i.e., 220 nm for full etching, 70 nm for shallow etching, and 130 nm (or 150 nm) for slab etching. Previously reported mode-evolution-based polarization rotators and splitters (PSRs) usually employ 130 nm-etched slab waveguides for adiabatic TM0-to-TE1 conversion, however, they are not compatible with the platforms adopting 150 nm-etching techniques. In this paper, we demonstrate a broadband PSR based on 70 nm-etched slab waveguides, which is compatible with all the platforms. The PSR consists of a bi-level taper and an inverse-tapered coupler. The length of the polarization rotator shrinks from hundreds to only thirty microns by employing the 70 nm-etched slab waveguides, while a high efficiency of >95% is achieved, covering an ultra-wide bandwidth from 1250 nm to 1650 nm. The proposed PSR shows superior performance over S, C, and L bands. Low cross-talk of <−20 dB and a loss of <1.5 dB are experimentally confirmed over a wavelength range of 75 nm.
Funder
National Natural Science Foundation of China
Natural Science Foundation of Zhejiang Province
Natural Science Foundation of Ningbo
Key Research and Development Program of Jiangsu Province
Subject
Radiology, Nuclear Medicine and imaging,Instrumentation,Atomic and Molecular Physics, and Optics
Cited by
4 articles.
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