1. State Key Laboratory of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
2. School of Microelectronics, University of Chinese Academy of Sciences (UCAS), Beijing 101408, China
3. School of Microelectronics, University of Science and Technology of China, Hefei 230026, China
4. College of Communication Engineering (College of Microelectronics), Chengdu University of Information Technology, Chengdu 610225, China