1. Scientific-Manufacturing Complex Technological Centre, 1–7 Shokin Square, Zelenograd, Moscow 124498, Russia
2. Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences, 32A Leninsky Prospekt, Moscow 119334, Russia
3. Municipal Clinical Hospital No.15 Named after O.M. Filatov, 23 Veshnyakovskaya St, Moscow 111539, Russia