Quick Response Circulating Water Cooling of ±3 mK Using Dynamic Thermal Filtering

Abstract

An enhanced circulating cooling water (CCW) machine is developed to simultaneously achieve high temperature stability and dynamic performance of CCW temperature control. Dynamic thermal filtering based on an auto-updatable thermal capacity medium is proposed to reduce the temperature fluctuation of the CCW. Agile thermal control is presented to realize a quick response and high resolution of temperature control, through thermal inertia minimization and bidirectional regulation of heating/cooling power. Experimental results indicate that a temperature stability of ±3 mK (peak to peak value) and a settling time of 128 s, corresponding to a 1 K step set value, are achieved. It can therefore be concluded that the developed machine can satisfy the challenging requirements of precision manufacturing.