Wavelength-Tuning Common-Path Digital Holographic Microscopy for Quantitative Phase Imaging of Functional Micro-Optics Components

Abstract

This study proposes a novel wavelength-tuning common-path digital holographic microscopy technique for quantitative phase imaging of functional micro-optics components. The proposed technique is immune to vibration and can reduce system error. In the proposed configuration, a parallel glass plate was inserted into the light path to create two identical test beams, which passed through a specially designed window filter. In this process, one beam serves as the object beam, while the other is diffracted to produce an ideal spherical wave front (the reference beam). A wavelength tunable laser was used as the light source to generate phase-shifting digital holograms. Structural information for the functional micro-optics components was then extracted using a classical four-step phase-shift algorithm. The viability of the proposed technique was assessed by measuring a micro-optics array.