1. Laboratory for MEMS Applications, Department of Microsystems Engineering—IMTEK, University of Freiburg, Georges-Koehler-Allee 103, 79110 Freiburg, Germany
2. Hahn-Schickard, Georges-Koehler-Allee 103, 79110 Freiburg, Germany
3. Department of Computer Science, University of Freiburg, Georges-Köhler-Allee 106, 79110 Freiburg, Germany