Fabrication and Testing of Thermoelectric CMOS-MEMS Microgenerators with CNCs Film-Reference-Cited by-同舟云学术

Fabrication and Testing of Thermoelectric CMOS-MEMS Microgenerators with CNCs Film

Published:2018-06-27 Issue:7 Volume:8 Page:1047
ISSN:2076-3417
Container-title:Applied Sciences
language:en
Short-container-title:Applied Sciences

Author:

Chen Yu-Wei,Wu Chyan-Chyi,Hsu Cheng-Chih,Dai Ching-Liang

Funder

Ministry of Science and Technology, Taiwan

Publisher

MDPI AG

Subject

Fluid Flow and Transfer Processes,Computer Science Applications,Process Chemistry and Technology,General Engineering,Instrumentation,General Materials Science

Link

http://www.mdpi.com/2076-3417/8/7/1047/pdf

Reference33 articles.

1. A Review of MEMS Scale Piezoelectric Energy Harvester

2. Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS Technology

3. Diffraction-Based Optical Switching with MEMS

4. Development of Dual-Axis MEMS Accelerometers for Machine Tools Vibration Monitoring

5. Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique

Cited by 19 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Manufacturing and measurement of CMOS-MEMS-based micro thermoelectric generators with long-length thermocouples;Journal of Micromechanics and Microengineering;2024-06-07

2. Efficiency analysis of thermoelectric generators;Materials Science and Engineering: B;2024-02

3. Enhancing Nanogrid sustainability and cost-efficiency by Recovering household waste heat;2023 Second International Conference on Energy Transition and Security (ICETS);2023-12-12

4. Thermoelectric Materials and Applications: A Review;Energies;2023-09-04

5. Review of Si-Based Thin Films and Materials for Thermoelectric Energy Harvesting and Their Integration into Electronic Devices for Energy Management Systems;Eng;2023-05-15