Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect
Author:
Publisher
MDPI AG
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Link
http://www.mdpi.com/1424-8220/16/7/1146/pdf
Reference20 articles.
1. A Sub-0.2$^{\circ}/$hr Bias Drift Micromechanical Silicon Gyroscope With Automatic CMOS Mode-Matching
2. High-Range Angular Rate Sensor Based on Mechanical Frequency Modulation
3. Vibration-induced errors in MEMS tuning fork gyroscopes
4. Design of a Novel MEMS Gyroscope Array
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