Capillary Self-Alignment of Microchips on Soft Substrates

Author:

Chang Bo,Zhou Quan,Wu Zhigang,Liu Zhenhua,Ras Robin,Hjort Klas

Funder

Academy of Finland

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering

Cited by 16 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

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2. A New 1-mg Fast Unimorph SMA-Based Actuator for Microrobotics;2023 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS);2023-10-01

3. Self-alignment of whole wafers using patterning for capillary forces;Journal of Vacuum Science & Technology B;2023-04-27

4. Method and experiment of self-calibration micro-components based on droplet array;2022 IEEE International Conference on Robotics and Biomimetics (ROBIO);2022-12-05

5. Capillary micromanipulation of microfibers;2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO);2021-08-02

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