Abstract
We have designed and fabricated a custom quartz tuning fork (QTF) with a reduced fundamental frequency; a larger gap between the prongs; and the best quality factor in air at atmospheric conditions ever reported, to our knowledge. Acoustic microresonators have been added to the QTF in order to enhance the sensor sensitivity. We demonstrate a normalized noise equivalent absorption (NNEA) of 3.7 × 10−9 W.cm−1.Hz−1/2 for CO2 detection at atmospheric pressure. The influence of the inner diameter and length of the microresonators has been studied, as well as the penetration depth between the QTF’s prongs. We investigated the acoustic isolation of our system and measured the Allan deviation of the sensor.
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Cited by
42 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献