PVDF Membrane-Based Dual-Channel Acoustic Sensor Integrating the Fabry–Pérot and Piezoelectric Effects

Abstract

A resonant acoustic wave detector combined with Fabry–Pérot interference (FPI) and piezoelectric (PE) effects based on a polyvinylidene fluoride (PVDF) piezoelectric film was proposed to enhance the ability of the sensor to detect acoustic signals in a specific frequency band. The deformation of circular thin films was indicated by the interference and piezoelectric effects simultaneously, and the noise level was decreased by the real-time convolution of the two-way parallel signal. This study reveals that, at the film’s resonance frequency, the minimum detection limits for the FPI and piezoelectric impacts on acoustic waves are 3.39 μPa/Hz1/2 and 20.8 μPa/Hz1/2, respectively. The convolution result shows that the background noise was reduced by 98.81% concerning the piezoelectric signal, and by 85.21% concerning the FPI signal. The convolution’s signal-to-noise ratio (SNR) was several times greater than the other two signals at 10 mPa. Therefore, this resonance sensor, which the FPI and the piezoelectric effect synergistically enhance, can be applied to scenarios of acoustic wave detection in a specific frequency band and with ultrahigh sensitivity requirements.