The Design and Fabrication of a MEMS Electronic Calibration Chip

Abstract

During the test of microelectromechanical system (MEMS) devices, calibration of test cables, loads and test instruments is an indispensable step. Calibration kits with high accuracy, great operability and small loss can reduce the systematic errors in the test process to the greatest extent and improve the measurement accuracy. Aiming at the issues of the conventional discrete calibration piece unit, which presents cumbersome calibration steps and large system loss, an integrated electronic calibration chip based on frequency microelectromechanical system (RF MEMS) switches is designed and fabricated. The short-open-load-through (SOLT) calibration states can be completed on a single chip, step by step, by adjusting the on–off state of the RF MEMS switches. The simulation results show that the operating frequency of the electronic calibration piece covers the range of DC~26.5 GHz, the insertion loss in through (thru) state is less than 0.2 dB, the return loss is less than 1.0 dB in short-circuit and open-circuit states, the return loss under load-circuit state is less than 20 dB and its size is only 2.748 mm × 2.2 mm × 0.5 mm. This novel calibration chip design has certain esteem for advancing calibration exactness and effectiveness.